Optics Japan 2002


›Jie ZhangAŠβ“c kˆκA‹e“c ‹v—Y

‡’v–@‚̍ŏ¬Ž©ζ–@‚Ι‚ζ‚ιlŽ@

The traditional fractional fringe method has been applied to measure 1-dimensitional size of block gauge using multiple wavelengths. Recently, similar methods are used in pattern interferometry and also in pattern projection profilometry. However, it does not seem to be based on an established principle. In this paper, fractional fringe method is formulated in view of the least square method and the guidance of selecting wavelengths will be discussed after analyzing the effects of errors in the method.


Optical Society Of Japan
An Affiliate of the Japan Society of Applied Physics